Defect studies of diamond hard coatings

A. Hempel, M. Hempel, M. Härting, D. T. Britton, W. Bauer-Kugelmann, W. Triftshäuser

Resultado de la investigación: Contribución a una revistaArtículorevisión exhaustiva

Resumen

We present the results of a combined study of the defect structure and residual stress in a diamond layer, grown by PECVD on a polycrystalline copper substrate with a titanium interlayer. For the defect studies, electron spectroscopies based on electron-positron annihilation were applied. X-ray diffraction techniques were used for both the stress determination in the diamond layer and for a phase analysis of the complete composite structure. The layer was found to contain a significant fraction of vacancy clusters and single vacancy type defects, which are probably situated within the individual grains. The presence of the larger defects may be related to a compressive stress in the layer.

Idioma originalInglés
Páginas (desde-hasta)215-220
Número de páginas6
PublicaciónRadiation Effects and Defects in Solids
Volumen156
N.º1
DOI
EstadoPublicada - 2001

Áreas temáticas de ASJC Scopus

  • Radiación
  • Física nuclear y de alta energía
  • Ciencia de los materiales (todo)
  • Física de la materia condensada

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