Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation

D. T. Britton, M. F. Barthe, C. Corbel, A. Hempel, L. Henry, P. Desgardin, W. Bauer-Kugelmann, G. Kögel, P. Sperr, W. Triftshäuser

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Physics & Astronomy